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SEMI E187 Semiconductor Equipment Security Standard Testing Tool

September 23, 2026

1. What Is SEMI E187? A Breakdown of the International Semiconductor Security Standard

As hacking attacks grow more severe, SEMI recommends that supply chains include SEMI E187 in their procurement specifications, and encourages more semiconductor equipment manufacturers to obtain security compliance certification in order to raise the overall level of protection across fabs. In September 2018, TSMC and ITRI jointly established the SEMI cybersecurity working group, connecting the upstream and downstream smart-manufacturing supply chain, building industry consensus on security, and leading the development of an international standard for risk control and security protection of production-line equipment operating systems — giving the semiconductor industry a security standard it can follow.

In January 2022, the first Taiwan-led security standard for semiconductor production equipment (SEMI E187) was officially published on the SEMI website. The standard sets out four main requirements:

  1. Operating system requirements: the version must remain supported for at least 12 months and be kept current with the latest security patches.
  2. Network security: secure protocols such as HTTPS, SFTP, and SSH must be provided.
  3. Endpoint protection: vulnerability scanning and malware monitoring must be available, and equipment must have access control settings.
  4. Security monitoring: complete event logs must be recorded and retained for at least one month.

2. Who Needs to Adopt It? Comprehensive Applications from Semiconductor Fabs and Suppliers to Security Teams

  • Semiconductor manufacturers (wafer fabs, packaging/testing plants): Enables rapid testing when equipment arrives on-site, saving inspection and acceptance time for new equipment and speeding up production line operations.
  • Semiconductor equipment suppliers: The testing tool reduces return and rework costs, ensuring delivered equipment meets SEMI E187 security compliance requirements.
  • Semiconductor industry security/IT teams: Can be used for routine security audits, strengthening the semiconductor supply chain environment and reducing security gaps caused by staffing shortages.

3. What Are the Features of the SEMI E187 Testing Tool? Key Highlights and Advantages

  1. A single tool for comprehensive testing, covering all checklist items required by the E187 standard.
  2. Supports FIDO2 Zero Trust identity authentication, with a built-in encrypted area for enhanced security.
  3. Offers a user interface in Chinese, English, and Japanese.
  4. Can test and re-verify specific files, directories, or items based on site-specific needs.
  5. Supports scanning and testing in offline environments, suited to real-world operational conditions.
  6. Runs a quick scan with a single click and generates a detailed test report to help users understand the issues.
  7. Reports are clear and detailed, and are stored on an encrypted disk to ensure data integrity.

4. How Does the SEMI E187 Testing Tool Work? Product Architecture Overview

SEMI E187 Product Architecture Diagram

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